e-Mission Hollow Cathodes
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e-Mission Hollow Cathodes


e-Mission Hollow cathode (中空陰極)結構緊湊,重量輕便,可以安裝在離子源或真空系統的側面,相對於燈絲的模式有更長的使用壽命,這在運行忌諱突然中斷的複雜工藝時,是非常有意義的。而且中空陰極 (Hollow cathode) 輻射的熱量更低,可以使襯底獲得更低的溫度,這相對於對溫度敏感的襯底材料而言,中空陰極的優勢是不言而喻的。

 

 

Model

HFx

SHC1000

DSHC1000

Cathode

Yes

Yes

Yes

Neutralizer

Yes

Yes

Yes

Orientation

Vertical / Horizontal

Vertical / Horizontal

Vertical / Horizontal

Regulation

Emission

Emission

Emission

Operational gas

None

Inert

Inert

Process gases

Inert & reactive

Inert & reactive

Inert & reactive

Power Controller

FC100x

e- Mission Power Pack

e- Mission Power Pack

 

 

 

 

Model

MHC1000

LHC1000

Cathode

Yes

Yes

Neutralizer

Yes

Yes

Orientation

Vertical / Horizontal

Vertical / Horizontal

Regulation

Emission

Emission

Operational gas

Inert

Inert

Process gases

Inert & reactive

Inert & reactive

Power Controller

e- Mission Power Pack

e- Mission Power Pack

 

 

 

 



 

 

 

 

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