eH Linear瀏覽數: 2716
KRI Ion Source eHL 線性離子源
KRI Ion Source eHL 線性離子源使用 eH 200 或 eH 400 做為模組，能應用於寬範圍的襯底，離子源長度高達 1 米，通過嚴格調整模組間的距離可以實現最佳的均勻性和離子流。由於模組是平行放置，大大簡化了氣體、功率和電子三者的分佈。KRI eHL 線性產品使用標準的端部霍爾模組並使設備的需求簡化，一個低成本、高電流和低能量的離子束可以很好的使用于 web 塗層、in-line 沉積和圓柱旋轉濺射系統。
KRI Ion Source eHL 線性離子源技術參數:
|
Model |
eHL 200-3 |
eHL 200-5 |
|
Height (nominal) |
2.9” (7.4cm) |
2.9” (7.4cm) |
|
Width (nominal) |
3.3” (8.4cm) |
3.3” (8.4cm) |
|
Length (nominal) |
Determined by number of modules & application |
Determined by number of modules & application |
|
Cathode/Neutralizer |
Yes |
Yes |
|
Anode module |
Yes |
Yes |
|
Filamentless |
Yes |
Yes |
|
Orientation |
Vertical / Horizontal |
Vertical / Horizontal |
|
Process gases |
Inert, reactive, & organic |
Inert, reactive, & organic |
|
Power controller |
eH Plasma Power Pack |
eH Plasma Power Pack |
KRI Ion Source
|
Model |
eHL 200-7 |
eHL 200-10 |
|
Height (nominal) |
2.9” (7.4cm) |
2.9” (7.4cm) |
|
Width (nominal) |
3.3” (8.4cm) |
3.3” (8.4cm) |
|
Length (nominal) |
Determined by number of modules & application |
Determined by number of modules & application |
|
Cathode/Neutralizer |
Yes |
Yes |
|
Anode module |
Yes |
Yes |
|
Filamentless |
Yes |
Yes |
|
Orientation |
Vertical / Horizontal |
Vertical / Horizontal |
|
Process gases |
Inert, reactive, & organic |
Inert, reactive, & organic |
|
Power controller |
eH Plasma Power Pack |
eH Plasma Power Pack |