eH Linear瀏覽數: 2629

KRI Ion Source eHL 線性離子源
KRI Ion Source eHL 線性離子源使用 eH 200 或 eH 400 做為模組,能應用於寬範圍的襯底,離子源長度高達 1 米,通過嚴格調整模組間的距離可以實現最佳的均勻性和離子流。由於模組是平行放置,大大簡化了氣體、功率和電子三者的分佈。KRI eHL 線性產品使用標準的端部霍爾模組並使設備的需求簡化,一個低成本、高電流和低能量的離子束可以很好的使用于 web 塗層、in-line 沉積和圓柱旋轉濺射系統。
KRI Ion Source eHL 線性離子源技術參數:
Model |
eHL 200-3 |
eHL 200-5 |
Height (nominal) |
2.9” (7.4cm) |
2.9” (7.4cm) |
Width (nominal) |
3.3” (8.4cm) |
3.3” (8.4cm) |
Length (nominal) |
Determined by number of modules & application |
Determined by number of modules & application |
Cathode/Neutralizer |
Yes |
Yes |
Anode module |
Yes |
Yes |
Filamentless |
Yes |
Yes |
Orientation |
Vertical / Horizontal |
Vertical / Horizontal |
Process gases |
Inert, reactive, & organic |
Inert, reactive, & organic |
Power controller |
eH Plasma Power Pack |
eH Plasma Power Pack |
KRI Ion Source
Model |
eHL 200-7 |
eHL 200-10 |
Height (nominal) |
2.9” (7.4cm) |
2.9” (7.4cm) |
Width (nominal) |
3.3” (8.4cm) |
3.3” (8.4cm) |
Length (nominal) |
Determined by number of modules & application |
Determined by number of modules & application |
Cathode/Neutralizer |
Yes |
Yes |
Anode module |
Yes |
Yes |
Filamentless |
Yes |
Yes |
Orientation |
Vertical / Horizontal |
Vertical / Horizontal |
Process gases |
Inert, reactive, & organic |
Inert, reactive, & organic |
Power controller |
eH Plasma Power Pack |
eH Plasma Power Pack |